The behavior of "dust" grains (particulates) in microelectronics process plasmas has been studied using N-body simulations. Grains are assumed to be negatively charged and interact through a screened Coulomb potential Φ(r). The dimensionless parameters κ=a/λ and Γ=Φ(a)/k BT characterize the thermodynamics of the particulate system, where λ is the ion Debye length, a=(3/4πnD)1/3 is the mean intergrain distance, and nD and T are the dust density and temperature. The simulations exhibit a transition between "fluid" and "solid" phases at a critical value Γc that depends on κ and weakly on the system history (i.e., whether it "melts" from an ordered state or "freezes" from a random one).R. T. Farouki and S. Hamaguchi, Appl. Phys. Lett. 61, 2973 ...
As a model of dusty plasmas in external fields, Yuka.wa system in a one-dimensional external field i...
A hierarchy of models is presented to study the basic physics of dust in RF laboratory plasmas in cl...
A theoretical approach which has been successful in reproducing results of molecular-dynamics simula...
In semiconductor manufacturing, contamination due to particulates significantly decreases the yield ...
When the Coulomb coupling between fine particles becomes sufficiently strong in fine particle plasma...
Structure formation of dust particles in dusty plasmas under microgravity has been simulated by the ...
The potential around a dust particle in a plasma is found using the collisional hydrodynamic equatio...
The structure of dust particles in dusty plasmas under microgravity has been analyzed by molecular d...
Molecular dynamics simulations are employed to study the equilibrium thermodynamics of strongly-coup...
Complex plasmas are plasmas with dust particles or liquid droplets suspended in them. Under certain ...
Complex (dusty) plasmas are a subject of growing interest. They areionized gases containing charged ...
University of Minnesota Ph.D. dissertation. October 2012. Major: Mechanical Engineering. Advisor: St...
Abstract. The characteristics of plasma particle kinetics in the presence of ions owing around two s...
In a ground-based definition study, a concept for a new type of microgravity experiment is developed...
The thermodynamic equilibrium of thermal dusty plasmas consisting of ionized gas (plasma) and solid ...
As a model of dusty plasmas in external fields, Yuka.wa system in a one-dimensional external field i...
A hierarchy of models is presented to study the basic physics of dust in RF laboratory plasmas in cl...
A theoretical approach which has been successful in reproducing results of molecular-dynamics simula...
In semiconductor manufacturing, contamination due to particulates significantly decreases the yield ...
When the Coulomb coupling between fine particles becomes sufficiently strong in fine particle plasma...
Structure formation of dust particles in dusty plasmas under microgravity has been simulated by the ...
The potential around a dust particle in a plasma is found using the collisional hydrodynamic equatio...
The structure of dust particles in dusty plasmas under microgravity has been analyzed by molecular d...
Molecular dynamics simulations are employed to study the equilibrium thermodynamics of strongly-coup...
Complex plasmas are plasmas with dust particles or liquid droplets suspended in them. Under certain ...
Complex (dusty) plasmas are a subject of growing interest. They areionized gases containing charged ...
University of Minnesota Ph.D. dissertation. October 2012. Major: Mechanical Engineering. Advisor: St...
Abstract. The characteristics of plasma particle kinetics in the presence of ions owing around two s...
In a ground-based definition study, a concept for a new type of microgravity experiment is developed...
The thermodynamic equilibrium of thermal dusty plasmas consisting of ionized gas (plasma) and solid ...
As a model of dusty plasmas in external fields, Yuka.wa system in a one-dimensional external field i...
A hierarchy of models is presented to study the basic physics of dust in RF laboratory plasmas in cl...
A theoretical approach which has been successful in reproducing results of molecular-dynamics simula...